Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6609962 | Dressing apparatus and polishing apparatus | Satoshi Wakabayashi, Kuniaki Yamaguchi, Nobuyuki Takada, Osamu Nabeya | 2003-08-26 |
| 6607427 | Dressing apparatus and polishing apparatus | Osamu Nabeya | 2003-08-19 |
| RE38215 | Polishing apparatus | Miki Shibata, Toyomi Nishi, Hidetaka Nakao | 2003-08-12 |
| 6602119 | Dressing apparatus | Kuniaki Yamaguchi, Nobuyuki Takada, Satoshi Wakabayashi | 2003-08-05 |
| 6579148 | Polishing apparatus | Kazuto Hirokawa, Hirokuni Hiyama, Yutaka Wada, Hisanori Matsuo | 2003-06-17 |
| 6578891 | Substrate holder and substrate transfer apparatus using the same | Hiroo Suzuki, Kenya Ito, Kunihiko Sakurai, Satoshi Wakabayashi | 2003-06-17 |
| 6558226 | Polishing apparatus | Nobuyuki Takada | 2003-05-06 |