Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6607426 | Polishing apparatus | — | 2003-08-19 |
| 6578891 | Substrate holder and substrate transfer apparatus using the same | Kenya Ito, Kunihiko Sakurai, Satoshi Wakabayashi, Tetsuji Togawa | 2003-06-17 |