Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6609962 | Dressing apparatus and polishing apparatus | Kuniaki Yamaguchi, Tetsuji Togawa, Nobuyuki Takada, Osamu Nabeya | 2003-08-26 |
| 6602119 | Dressing apparatus | Tetsuji Togawa, Kuniaki Yamaguchi, Nobuyuki Takada | 2003-08-05 |
| 6578891 | Substrate holder and substrate transfer apparatus using the same | Hiroo Suzuki, Kenya Ito, Kunihiko Sakurai, Tetsuji Togawa | 2003-06-17 |