Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6578891 | Substrate holder and substrate transfer apparatus using the same | Hiroo Suzuki, Kenya Ito, Satoshi Wakabayashi, Tetsuji Togawa | 2003-06-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6578891 | Substrate holder and substrate transfer apparatus using the same | Hiroo Suzuki, Kenya Ito, Satoshi Wakabayashi, Tetsuji Togawa | 2003-06-17 |