Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6647614 | Method for changing an electrical resistance of a resistor | Arne Ballantine, Daniel C. Edelstein, Anthony K. Stamper | 2003-11-18 |
| 6645861 | Self-aligned silicide process for silicon sidewall source and drain contacts | Kevin K. Chan, Guy M. Cohen, Kathryn Guarini, Christian Lavoie, Paul M. Solomon +1 more | 2003-11-11 |
| 6589874 | Method for forming electromigration-resistant structures by doping | Panayotis Andricacos, Christopher C. Parks, Kenneth P. Rodbell, Roger Y. Tsai | 2003-07-08 |
| 6570255 | Method for forming interconnects on semiconductor substrates and structures formed | Panayotis Andricacos, John M. Cotte, Lynne M. Gignac, Wilma Jean Horkans, Kenneth P. Rodbell | 2003-05-27 |
| 6555880 | Self-aligned silicide process utilizing ion implants for reduced silicon consumption and control of the silicide formation temperature and structure formed thereby | Kevin K. Chan, Guy M. Cohen, Kathryn Guarini, Christian Lavoie, Ronnen Andrew Roy +1 more | 2003-04-29 |
| 6545339 | Semiconductor device incorporating elements formed of refractory metal-silicon-nitrogen and method for fabrication | Lawrence A. Clevenger, Louis L. Hsu, Keith Kwong Hon Wong | 2003-04-08 |
| 6524908 | Method for forming refractory metal-silicon-nitrogen capacitors and structures formed | Lawrence A. Clevenger, Louis L. Hsu, Keith Kwong Hon Wong | 2003-02-25 |
| 6503641 | Interconnects with Ti-containing liners | Roy A. Carruthers, James M. E. Harper, Chao-Kun Hu, Kim Y. Lee, Ismail C. Noyan +2 more | 2003-01-07 |
| 6503833 | Self-aligned silicide (salicide) process for strained silicon MOSFET ON SiGe and structure formed thereby | Atul Ajmera, Roy A. Carruthers, Kevin K. Chan, Guy M. Cohen, Paul Kozlowski +3 more | 2003-01-07 |