Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6555830 | Suppression of emission noise for microcolumn applications in electron beam inspection | Marian Mankos, Tai-Hon Philip Chang, Ming Lun Yu | 2003-04-29 |
| 6538256 | Electron beam lithography system using a photocathode with a pattern of apertures for creating a transmission resonance | Marian Mankos, Vidhya Krishnamurthi | 2003-03-25 |
| 6503641 | Interconnects with Ti-containing liners | Cyril Cabral, Jr., Roy A. Carruthers, James M. E. Harper, Chao-Kun Hu, Ismail C. Noyan +2 more | 2003-01-07 |