Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6555829 | High precision flexure stage | James Spallas, Lawrence P. Muray, David Trost, Ho Seob Kim | 2003-04-29 |
| 6555830 | Suppression of emission noise for microcolumn applications in electron beam inspection | Marian Mankos, Kim Y. Lee, Ming Lun Yu | 2003-04-29 |