Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641273 | MEMS structure with mechanical overdeflection limiter | Bryan P. Staker, James Spallas, Andres Fernandez | 2003-11-04 |
| 6555829 | High precision flexure stage | James Spallas, David Trost, Ho Seob Kim, Tai-Hon Philip Chang | 2003-04-29 |