Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649987 | MEMS hybrid structure having flipped silicon with external standoffs | Douglas L. Teeter, Jr., Andres Fernandez, David T. Amm | 2003-11-18 |
| 6641273 | MEMS structure with mechanical overdeflection limiter | James Spallas, Lawrence P. Muray, Andres Fernandez | 2003-11-04 |
| 6635158 | Electro ceramic MEMS structure with controlled actuator gap | Douglas L. Teeter, Jr., David T. Amm | 2003-10-21 |
| 6509816 | Electro ceramic MEMS structure with oversized electrodes | Douglas L. Teeter, Jr., Thomas DeBey, David T. Amm | 2003-01-21 |