Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6555830 | Suppression of emission noise for microcolumn applications in electron beam inspection | Tai-Hon Philip Chang, Kim Y. Lee, Ming Lun Yu | 2003-04-29 |
| 6538256 | Electron beam lithography system using a photocathode with a pattern of apertures for creating a transmission resonance | Vidhya Krishnamurthi, Kim Y. Lee | 2003-03-25 |