Issued Patents 2003
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649531 | Process for forming a damascene structure | William J. Cote, Timothy J. Dalton, Prakash Dev, Scott D. Halle, Gill Yong Lee +1 more | 2003-11-18 |
| 6647614 | Method for changing an electrical resistance of a resistor | Arne Ballantine, Cyril Cabral, Jr., Anthony K. Stamper | 2003-11-18 |
| 6646345 | Method for forming Co-W-P-Au films | Carlos J. Sambucetti, Judith M. Rubino, Cyryl Cabral, Jr., George F. Walker, John G. Gaudiello +1 more | 2003-11-11 |
| 6632377 | Chemical-mechanical planarization of metallurgy | Vlasta Brusic, Paul M. Feeney, William L. Guthrie, Mark A. Jaso, Frank B. Kaufman +4 more | 2003-10-14 |
| 6569783 | Graded composition diffusion barriers for chip wiring applications | Cyprian Emeka Uzoh, Andrew H. Simon | 2003-05-27 |
| 6570256 | Carbon-graded layer for improved adhesion of low-k dielectrics to silicon substrates | Richard A. Conti, Prakash Dev, David M. Dobuzinsky, Gill Yong Lee, Kia-Seng Low +3 more | 2003-05-27 |
| 6551931 | Method to selectively cap interconnects with indium or tin bronzes and/or oxides thereof and the interconnect so capped | Sung Kwon Kang, Maurice McGlashan-Powell, Eugene J. O'Sullivan, George F. Walker | 2003-04-22 |
| 6548901 | Cu/low-k BEOL with nonconcurrent hybrid dielectric interface | William J. Cote, Timothy J. Dalton, Stephen M. Gates | 2003-04-15 |
| 6531412 | Method for low temperature chemical vapor deposition of low-k films using selected cyclosiloxane and ozone gases for semiconductor applications | Richard A. Conti, Gill Yong Lee | 2003-03-11 |
| 6525427 | BEOL decoupling capacitor | Peter Richard Duncombe, Robert Benjamin Laibowitz, Deborah A. Neumayer, Tak H. Ning, Robert Rosenberg +1 more | 2003-02-25 |
| 6522304 | Dual damascene horn antenna | Arne Ballantine, James S. Nakos, Anthony K. Stamper | 2003-02-18 |