Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6657305 | Semiconductor recessed mask interconnect technology | Stephen A. Cohen, John A. Fitzsimmons, Stephen M. Gates, Brian Herbst, Sampath Purushothaman +1 more | 2003-12-02 |
| 6649531 | Process for forming a damascene structure | William J. Cote, Prakash Dev, Daniel C. Edelstein, Scott D. Halle, Gill Yong Lee +1 more | 2003-11-18 |
| 6635506 | Method of fabricating micro-electromechanical switches on CMOS compatible substrates | Richard P. Volant, John C. Bisson, Donna R. Cote, Robert A. Groves, Kevin S. Petrarca +2 more | 2003-10-21 |
| 6617690 | Interconnect structures containing stress adjustment cap layer | Stephen M. Gates, John A. Fitzsimmons | 2003-09-09 |
| 6613484 | Method to decrease fluorine contamination in low dielectric constant films | Bernd Kastenmeier, Theodorus E. Standaert | 2003-09-02 |
| 6551924 | Post metalization chem-mech polishing dielectric etch | John P. Hummel | 2003-04-22 |
| 6548901 | Cu/low-k BEOL with nonconcurrent hybrid dielectric interface | William J. Cote, Daniel C. Edelstein, Stephen M. Gates | 2003-04-15 |