Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649531 | Process for forming a damascene structure | Timothy J. Dalton, Prakash Dev, Daniel C. Edelstein, Scott D. Halle, Gill Yong Lee +1 more | 2003-11-18 |
| 6548901 | Cu/low-k BEOL with nonconcurrent hybrid dielectric interface | Timothy J. Dalton, Daniel C. Edelstein, Stephen M. Gates | 2003-04-15 |
| RE38029 | Wafer polishing and endpoint detection | Michael A. Leach | 2003-03-11 |