Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649531 | Process for forming a damascene structure | William J. Cote, Timothy J. Dalton, Prakash Dev, Daniel C. Edelstein, Scott D. Halle +1 more | 2003-11-18 |
| 6607984 | Removable inorganic anti-reflection coating process | Scott D. Halle, Jochen Beintner | 2003-08-19 |
| 6570256 | Carbon-graded layer for improved adhesion of low-k dielectrics to silicon substrates | Richard A. Conti, Prakash Dev, David M. Dobuzinsky, Daniel C. Edelstein, Kia-Seng Low +3 more | 2003-05-27 |
| 6531412 | Method for low temperature chemical vapor deposition of low-k films using selected cyclosiloxane and ozone gases for semiconductor applications | Richard A. Conti, Daniel C. Edelstein | 2003-03-11 |