Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667504 | Self-aligned buried strap process using doped HDP oxide | Jochen Beintner, Wolfgang Bergner, Andreas Knorr, Rolf Weis | 2003-12-23 |
| 6570256 | Carbon-graded layer for improved adhesion of low-k dielectrics to silicon substrates | Prakash Dev, David M. Dobuzinsky, Daniel C. Edelstein, Gill Yong Lee, Kia-Seng Low +3 more | 2003-05-27 |
| 6548357 | Modified gate processing for optimized definition of array and logic devices on same chip | Mary E. Weybright, Gary B. Bronner, Ramachandra Divakaruni, Jeffrey P. Gambino, Peter D. Hoh +1 more | 2003-04-15 |
| 6531412 | Method for low temperature chemical vapor deposition of low-k films using selected cyclosiloxane and ozone gases for semiconductor applications | Daniel C. Edelstein, Gill Yong Lee | 2003-03-11 |