Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656375 | Selective nitride: oxide anisotropic etch process | Michael D. Armacost, John C. Malinowski, Hung Y. Ng, Richard S. Wise, Chienfan Yu | 2003-12-02 |
| 6570256 | Carbon-graded layer for improved adhesion of low-k dielectrics to silicon substrates | Richard A. Conti, Prakash Dev, Daniel C. Edelstein, Gill Yong Lee, Kia-Seng Low +3 more | 2003-05-27 |
| 6518151 | Dual layer hard mask for eDRAM gate etch process | Babar A. Khan, Joyce C. Liu, Paul Wensley, Chienfan Yu | 2003-02-11 |