Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6518151 | Dual layer hard mask for eDRAM gate etch process | David M. Dobuzinsky, Babar A. Khan, Paul Wensley, Chienfan Yu | 2003-02-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6518151 | Dual layer hard mask for eDRAM gate etch process | David M. Dobuzinsky, Babar A. Khan, Paul Wensley, Chienfan Yu | 2003-02-11 |