Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656375 | Selective nitride: oxide anisotropic etch process | Michael D. Armacost, David M. Dobuzinsky, John C. Malinowski, Hung Y. Ng, Richard S. Wise | 2003-12-02 |
| 6617085 | Wet etch reduction of gate widths | Babar A. Kanh, Naim Moumen, Wesley C. Natzle | 2003-09-09 |
| 6541320 | Method to controllably form notched polysilicon gate structures | Jeffrey J. Brown, Richard S. Wise, Hongwen Yan, Qingyun Yang | 2003-04-01 |
| 6518151 | Dual layer hard mask for eDRAM gate etch process | David M. Dobuzinsky, Babar A. Khan, Joyce C. Liu, Paul Wensley | 2003-02-11 |
| 6509219 | Fabrication of notched gates by passivating partially etched gate sidewalls and then using an isotropic etch | Len Yuan Tsou, Hongwen Yan, Qingyun Yang | 2003-01-21 |