Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6541320 | Method to controllably form notched polysilicon gate structures | Jeffrey J. Brown, Richard S. Wise, Qingyun Yang, Chienfan Yu | 2003-04-01 |
| 6509219 | Fabrication of notched gates by passivating partially etched gate sidewalls and then using an isotropic etch | Len Yuan Tsou, Qingyun Yang, Chienfan Yu | 2003-01-21 |