Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6657305 | Semiconductor recessed mask interconnect technology | Stephen A. Cohen, Timothy J. Dalton, Stephen M. Gates, Brian Herbst, Sampath Purushothaman +1 more | 2003-12-02 |
| 6638878 | Film planarization for low-k polymers used in semiconductor structures | Darryl D. Restaino, Jeffrey Hedrick, Christy S. Tyberg, Chih-Chien Liu, Shahab Siddiqui | 2003-10-28 |
| 6626188 | Method for cleaning and preconditioning a chemical vapor deposition chamber dome | Thomas Ivers, Pavel Smetana | 2003-09-30 |
| 6617690 | Interconnect structures containing stress adjustment cap layer | Stephen M. Gates, Timothy J. Dalton | 2003-09-09 |