Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638878 | Film planarization for low-k polymers used in semiconductor structures | Jeffrey Hedrick, John A. Fitzsimmons, Christy S. Tyberg, Chih-Chien Liu, Shahab Siddiqui | 2003-10-28 |