Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638878 | Film planarization for low-k polymers used in semiconductor structures | Darryl D. Restaino, Jeffrey Hedrick, John A. Fitzsimmons, Christy S. Tyberg, Shahab Siddiqui | 2003-10-28 |
| 6583489 | Method for forming interconnect structure with low dielectric constant | Sung-Hsiung Wang, Yi-Min Huang, Gwo-Shii Yang, Chiung-Sheng Hsiung, Hsueh-Chung Chen | 2003-06-24 |
| 6562731 | Method for forming dielectric layers | Juan-Yuan Wu, Water Lur | 2003-05-13 |