Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638878 | Film planarization for low-k polymers used in semiconductor structures | Darryl D. Restaino, Jeffrey Hedrick, John A. Fitzsimmons, Chih-Chien Liu, Shahab Siddiqui | 2003-10-28 |
| 6537908 | Method for dual-damascence patterning of low-k interconnects using spin-on distributed hardmask | Ann R. Fornof, Stephen M. Gates, Jeffrey Hedrick, Satyanarayana V. Nitta, Sampath Purushothaman | 2003-03-25 |