Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641899 | Nonlithographic method to produce masks by selective reaction, articles produced, and composition for same | Matthew E. Colburn, Stephen M. Gates, Jeffrey Hedrick, Elbert E. Huang, Sampath Purushothaman +1 more | 2003-11-04 |
| 6603204 | Low-k interconnect structure comprised of a multilayer of spin-on porous dielectrics | Stephen M. Gates, Jeffrey Hedrick, Sampath Purushothaman, Cristy Sensenich Tyberg | 2003-08-05 |
| 6537908 | Method for dual-damascence patterning of low-k interconnects using spin-on distributed hardmask | Ann R. Fornof, Stephen M. Gates, Jeffrey Hedrick, Sampath Purushothaman, Christy S. Tyberg | 2003-03-25 |