Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641899 | Nonlithographic method to produce masks by selective reaction, articles produced, and composition for same | Matthew E. Colburn, Stephen M. Gates, Elbert E. Huang, Satyanarayana V. Nitta, Sampath Purushothaman +1 more | 2003-11-04 |
| 6638878 | Film planarization for low-k polymers used in semiconductor structures | Darryl D. Restaino, John A. Fitzsimmons, Christy S. Tyberg, Chih-Chien Liu, Shahab Siddiqui | 2003-10-28 |
| 6603204 | Low-k interconnect structure comprised of a multilayer of spin-on porous dielectrics | Stephen M. Gates, Satyanarayana V. Nitta, Sampath Purushothaman, Cristy Sensenich Tyberg | 2003-08-05 |
| 6537908 | Method for dual-damascence patterning of low-k interconnects using spin-on distributed hardmask | Ann R. Fornof, Stephen M. Gates, Satyanarayana V. Nitta, Sampath Purushothaman, Christy S. Tyberg | 2003-03-25 |