Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613484 | Method to decrease fluorine contamination in low dielectric constant films | Timothy J. Dalton, Theodorus E. Standaert | 2003-09-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613484 | Method to decrease fluorine contamination in low dielectric constant films | Timothy J. Dalton, Theodorus E. Standaert | 2003-09-02 |