Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6632377 | Chemical-mechanical planarization of metallurgy | Daniel C. Edelstein, Paul M. Feeney, William L. Guthrie, Mark A. Jaso, Frank B. Kaufman +4 more | 2003-10-14 |
| 6527622 | CMP method for noble metals | Francesco M. De Rege, Kevin Moeggenborg, Isaac K. Cherian, Renjie Zhou | 2003-03-04 |