Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6632377 | Chemical-mechanical planarization of metallurgy | Vlasta Brusic, Daniel C. Edelstein, William L. Guthrie, Mark A. Jaso, Frank B. Kaufman +4 more | 2003-10-14 |
| 6503827 | Method of reducing planarization defects | Susan G. Bombardier, Robert M. Geffken, David V. Horak, Matthew J. Rutten | 2003-01-07 |