Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660582 | Method of forming a vertical field-effect transistor device | Albert Birner | 2003-12-09 |
| 6620724 | Low resistivity deep trench fill for DRAM and EDRAM applications | Uwe Schroeder, Helmut Tews, Irene McStay, Manfred Hauf, Bernhard Sell +5 more | 2003-09-16 |
| 6559069 | Process for the electrochemical oxidation of a semiconductor substrate | Albert Birner | 2003-05-06 |