Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613642 | Method for surface roughness enhancement in semiconductor capacitor manufacturing | Irene McStay, Helmut Tews, Uwe Schroeder, Stephan Kudelka, Rajarao Jammy | 2003-09-02 |
| 6559002 | Rough oxide hard mask for DT surface area enhancement for DT DRAM | Stephan Kudelka, Helmut Tews, Irene McStay, Uwe Schroeder | 2003-05-06 |