Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670646 | Mask and method for patterning a semiconductor wafer | Zhijian Lu, Alois Gutmann | 2003-12-30 |
| 6606151 | Grating patterns and method for determination of azimuthal and radial aberration | Gerhard Kunkel, Joseph P. Kirk | 2003-08-12 |
| 6590657 | Semiconductor structures and manufacturing methods | Christian Summerer, Gerhard Kunkel, Uwe Schroeder | 2003-07-08 |
| 6571383 | Semiconductor device fabrication using a photomask designed using modeling and empirical testing | Henning Haffner, Beate Frankowsky | 2003-05-27 |
| 6566219 | Method of forming a self aligned trench in a semiconductor using a patterned sacrificial layer for defining the trench opening | Gerhard Kunkel, Ramachandra Divakaruni, Armin Reith, Munir D. Naeem | 2003-05-20 |