Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6566219 | Method of forming a self aligned trench in a semiconductor using a patterned sacrificial layer for defining the trench opening | Gerhard Kunkel, Shahid Butt, Ramachandra Divakaruni, Armin Reith | 2003-05-20 |
| 6555204 | Method of preventing bridging between polycrystalline micro-scale features | Lawrence A. Clevenger | 2003-04-29 |
| 6551942 | Methods for etching tungsten stack structures | — | 2003-04-22 |
| 6544838 | Method of deep trench formation with improved profile control and surface area | Rajiv Ranade, Gangadhara S. Mathad | 2003-04-08 |