Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6606151 | Grating patterns and method for determination of azimuthal and radial aberration | Shahid Butt, Joseph P. Kirk | 2003-08-12 |
| 6590657 | Semiconductor structures and manufacturing methods | Christian Summerer, Shahid Butt, Uwe Schroeder | 2003-07-08 |
| 6566219 | Method of forming a self aligned trench in a semiconductor using a patterned sacrificial layer for defining the trench opening | Shahid Butt, Ramachandra Divakaruni, Armin Reith, Munir D. Naeem | 2003-05-20 |
| 6558883 | Apparatus and method for patterning a semiconductor wafer | Oliver Genz, Jurgen Preuninger | 2003-05-06 |
| 6511791 | Multiple exposure process for formation of dense rectangular arrays | Scott Bukofsky, Richard J. Wise, Alfred Wong | 2003-01-28 |