Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6566030 | Methods and compositions for imaging acids in chemically amplified photoresists using pH-dependent fluorophores | Robert D. Grober, Paul Dentinger, James Welch Taylor | 2003-05-20 |
| 6563566 | System and method for printing semiconductor patterns using an optimized illumination and reticle | Alan E. Rosenbluth, Alfred Wong | 2003-05-13 |
| 6511791 | Multiple exposure process for formation of dense rectangular arrays | Gerhard Kunkel, Richard J. Wise, Alfred Wong | 2003-01-28 |