Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670235 | Process flow for two-step collar in DRAM preparation | Helmut Tews, Stephan Kudelka | 2003-12-30 |
| 6558883 | Apparatus and method for patterning a semiconductor wafer | Jurgen Preuninger, Gerhard Kunkel | 2003-05-06 |