Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6631511 | Generating mask layout data for simulation of lithographic processes | Armin Semmler, Christoph Friedrich | 2003-10-07 |
| 6586308 | Method for producing circuit structures on a semiconductor substrate and semiconductor configuration with functional circuit structures and dummy circuit structures | Sabine Kling, Dominique Savignac, Hans-Peter Moll, Elke Hietschold, Ines Anke | 2003-07-01 |
| 6571383 | Semiconductor device fabrication using a photomask designed using modeling and empirical testing | Shahid Butt, Beate Frankowsky | 2003-05-27 |