Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660437 | Alternating phase mask | Uwe Griesinger, Michael Heissmeier, Burkhard Ludwig, Molela Moukara, Rainer Pforr | 2003-12-09 |
| 6635388 | Contact hole fabrication with the aid of mutually crossing sudden phase shift edges of a single phase shift mask | Uwe Griesinger, Rainer Pforr, Dietrich Widmann, Andreas Grassmann | 2003-10-21 |
| 6631511 | Generating mask layout data for simulation of lithographic processes | Henning Haffner, Armin Semmler | 2003-10-07 |