Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635388 | Contact hole fabrication with the aid of mutually crossing sudden phase shift edges of a single phase shift mask | Christoph Friedrich, Uwe Griesinger, Rainer Pforr, Dietrich Widmann | 2003-10-21 |