Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635388 | Contact hole fabrication with the aid of mutually crossing sudden phase shift edges of a single phase shift mask | Christoph Friedrich, Uwe Griesinger, Rainer Pforr, Andreas Grassmann | 2003-10-21 |
| 6515319 | Field-effect-controlled transistor and method for fabricating the transistor | Armin Wieder, Justus Kuhn, Jens Lüpke, Jochen Müller, Peter Pöchmüller +1 more | 2003-02-04 |
| 6503784 | Double gated transistor | Gerhard Enders, Thomas Schulz, Lothar Risch | 2003-01-07 |