Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660437 | Alternating phase mask | Christoph Friedrich, Uwe Griesinger, Michael Heissmeier, Burkhard Ludwig, Molela Moukara | 2003-12-09 |
| 6635388 | Contact hole fabrication with the aid of mutually crossing sudden phase shift edges of a single phase shift mask | Christoph Friedrich, Uwe Griesinger, Dietrich Widmann, Andreas Grassmann | 2003-10-21 |
| 6627392 | Method of transferring a pattern of high structure density by multiple exposure of less dense partial patterns | Fritz Gans | 2003-09-30 |