Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660437 | Alternating phase mask | Christoph Friedrich, Uwe Griesinger, Michael Heissmeier, Burkhard Ludwig, Rainer Pforr | 2003-12-09 |
| 6543045 | Method for detecting and automatically eliminating phase conflicts on alternating phase masks | Burkhard Ludwig | 2003-04-01 |