Issued Patents All Time
Showing 26–44 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8937003 | Technique for ion implanting a target | Alexander S. Perel, Wayne LeBlanc, Robert C. Lindberg, Antonella Cucchetti, Neil J. Bassom +2 more | 2015-01-20 |
| 8912976 | Internal RF antenna with dielectric insulation | Wilhelm P. Platow | 2014-12-16 |
| 8901820 | Ribbon antenna for versatile operation and efficient RF power coupling | Costel Biloiu | 2014-12-02 |
| 8809800 | Ion source and a method for in-situ cleaning thereof | Bon-Woong Koo, Christopher Campbell, Robert C. Lindberg, Wilhelm P. Platow, Alexander S. Perel | 2014-08-19 |
| 8592783 | Titanium diboride coating for plasma processing apparatus | Kamal Hadidi, George D. Papasouliotis | 2013-11-26 |
| 8501624 | Excited gas injection for ion implant control | Bon-Woong Koo, Victor M. Benveniste, Christopher A. Rowland, Frank Sinclair, Neil J. Bassom | 2013-08-06 |
| 8466431 | Techniques for improving extracted ion beam quality using high-transparency electrodes | James S. Buff, Svetlana B. Radovanov, Bon-Woong Koo, Wilhelm P. Platow, Frank Sinclair +7 more | 2013-06-18 |
| 8455839 | Cleaning of an extraction aperture of an ion source | Alexander S. Perel, Neil J. Bassom, Leo V. Klos | 2013-06-04 |
| 8330127 | Flexible ion source | Russell J. Low, Jay T. Scheuer, Alexander S. Perel, Neil J. Bassom | 2012-12-11 |
| 8263944 | Directional gas injection for an ion source cathode assembly | John Bon-Woong Koo, David J. Twiss, Chris Campbell, Frank Sinclair, Alexander S. Perel +2 more | 2012-09-11 |
| 8071956 | Cleaning of an extraction aperture of an ion source | Alexander S. Perel, Leo V. Klos | 2011-12-06 |
| 8003957 | Ethane implantation with a dilution gas | Adolph R. Dori, Christopher R. Hatem, Alexander S. Perel | 2011-08-23 |
| 8003959 | Ion source cleaning end point detection | Wilhelm P. Platow, Neil J. Bassom, Peter F. Kurunczi, Alexander S. Perel | 2011-08-23 |
| 7888662 | Ion source cleaning method and apparatus | Costel Biloiu, Eric R. Cobb, Bon-Woong Koo, Wilhelm P. Platow | 2011-02-15 |
| 7723697 | Techniques for optical ion beam metrology | Alexander S. Perel, Wilhelm P. Platow, Frank Sinclair, Tyler Rockwell | 2010-05-25 |
| 7655932 | Techniques for providing ion source feed materials | Christopher R. Hatem, Eric R. Cobb, Joseph C. Olson, Chris Campbell | 2010-02-02 |
| 7586109 | Technique for improving the performance and extending the lifetime of an ion source with gas dilution | Alexander S. Perel | 2009-09-08 |
| 7491947 | Technique for improving performance and extending lifetime of indirectly heated cathode ion source | Eric R. Cobb, Russell J. Low, Leo V. Klos | 2009-02-17 |
| 7446326 | Technique for improving ion implanter productivity | Russell J. Low, Jonathan Gerald England | 2008-11-04 |