Issued Patents All Time
Showing 26–50 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7960293 | Method for forming insulating film and method for manufacturing semiconductor device | Minoru Honda, Yoshihiro Sato | 2011-06-14 |
| 7915177 | Method of forming gate insulation film, semiconductor device, and computer recording medium | Tatsuo Nishita, Shuuichi Ishizuka, Yutaka Fujino, Yoshihiro Sato | 2011-03-29 |
| 7897518 | Plasma processing method and computer storage medium | Seiji Matsuyama, Shigenori Ozaki, Hikaru Adachi, Koichi Takatsuki, Yoshihiro Sato | 2011-03-01 |
| 7820557 | Method for nitriding substrate and method for forming insulating film | Minoru Honda | 2010-10-26 |
| 7763551 | RLSA CVD deposition control using halogen gas for hydrogen scavenging | Jozef Brcka, Song yun Kang, Peter L. G. Ventzek, Minoru Honda, Masayuki Kohno | 2010-07-27 |
| 7723241 | Plasma processing method and computer storage medium | Seiji Matsuyama, Shigenori Ozaki, Hikaru Adachi, Koichi Takatsuki, Yoshihiro Sato | 2010-05-25 |
| 7674722 | Method of forming gate insulating film, semiconductor device and computer recording medium | Tatsuo Nishita, Shuuichi Ishizuka, Yutaka Fujino, Yoshihiro Sato | 2010-03-09 |
| 7662236 | Method for forming insulation film | Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Shigenori Ozaki, Masaru Sasaki +1 more | 2010-02-16 |
| 7655574 | Method of modifying insulating film | Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Shigenori Ozaki, Masaru Sasaki +4 more | 2010-02-02 |
| 7622402 | Method for forming underlying insulation film | Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Shigenori Ozaki, Masaru Sasaki +4 more | 2009-11-24 |
| 7446052 | Method for forming insulation film | Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Shigenori Ozaki, Masaru Sasakii +1 more | 2008-11-04 |
| 7429539 | Nitriding method of gate oxide film | Seiji Matsuyama, Takuya Sugawara, Shigenori Ozaki, Masaru Sasaki | 2008-09-30 |
| 7374635 | Forming method and forming system for insulation film | Shigemi Murakawa, Toshikazu Kumai | 2008-05-20 |
| 7250375 | Substrate processing method and material for electronic device | Takuya Sugawara, Seiji Matsuyama, Masaru Sasaki | 2007-07-31 |
| 7232772 | Substrate processing method | Seiji Matsuyama, Takuya Sugawara, Shigenori Ozaki, Masaru Sasaki | 2007-06-19 |
| 7226874 | Substrate processing method | Seiji Matsuyama, Takuya Sugawara, Shigenori Ozaki, Masaru Sasaki | 2007-06-05 |
| 7217659 | Process for producing materials for electronic device | Takuya Sugawara, Shigenori Ozaki, Seiji Matsuyama, Shigemi Murakawa, Yoshihide Tada | 2007-05-15 |
| 7166185 | Forming system for insulation film | Shigemi Murakawa, Toshikazu Kumai | 2007-01-23 |
| 7053515 | Rotor for dynamo-electric machine | Masashi Ono, Takushi Takizawa, Atsushi Oohashi, Katsunori Tanaka | 2006-05-30 |
| 6897149 | Method of producing electronic device material | Takuya Sugawara, Shigenori Ozaki, Seiji Matsuyama, Shigemi Murakawa, Yoshihide Tada | 2005-05-24 |
| 6290807 | Apparatus and method for microwave plasma process | Naoki Matsumoto | 2001-09-18 |
| 6076484 | Apparatus and method for microwave plasma process | Naoki Matsumoto | 2000-06-20 |
| D406613 | Electronic game housing | — | 1999-03-09 |
| 5815366 | Electrostatic chuck and the method of operating the same | Yoshihisa Morita, Nobuo Okumura | 1998-09-29 |
| 5255160 | Electronic device package | Misao Iwatare, Toshimasa Umetsu, Makoto Moribe, Keijiro Kadomatsu, Toshiki Shimasaki +1 more | 1993-10-19 |