Issued Patents All Time
Showing 51–75 of 93 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8273258 | Fine pattern forming method | Takashi Sone | 2012-09-25 |
| 8262921 | Substrate processing method, substrate processing apparatus and recording medium | — | 2012-09-11 |
| 8252698 | Substrate processing method | Masato Kushibiki | 2012-08-28 |
| 8241511 | Substrate processing method | Masato Kushibiki | 2012-08-14 |
| 8210742 | Method and apparatus for detecting foreign matter attached to peripheral edge of substrate, and storage medium | Tsuyoshi Moriya | 2012-07-03 |
| 8202805 | Substrate processing method | Masato Kushibiki | 2012-06-19 |
| 8198183 | Forming method of etching mask, control program and program storage medium | Koichi Yatsuda | 2012-06-12 |
| 8173357 | Method of forming etching mask, etching method using the etching mask, and method of fabricating semiconductor device including the etching method | — | 2012-05-08 |
| 8132580 | Substrate processing system and substrate cleaning apparatus including a jetting apparatus | Tsuyoshi Moriya, Tadashi Onishi, Ryo Nonaka | 2012-03-13 |
| 8129285 | Substrate processing system | — | 2012-03-06 |
| 8124536 | Manufacturing method of capacitor electrode, manufacturing system of capacitor electrode, and storage medium | — | 2012-02-28 |
| 8114781 | Substrate processing method and substrate processing apparatus | Koichi Yatsuda | 2012-02-14 |
| 8043472 | Substrate processing apparatus and focus ring | Masaaki Miyagawa | 2011-10-25 |
| 8034720 | Substrate processing method and substrate processing apparatus | Chie Kato, Jun Yamawaku | 2011-10-11 |
| 7993540 | Substrate processing method and substrate processing apparatus | — | 2011-08-09 |
| 7985699 | Substrate processing method and storage medium | — | 2011-07-26 |
| 7892986 | Ashing method and apparatus therefor | Shigeru Tahara, Kumiko Yamazaki | 2011-02-22 |
| 7871908 | Method of manufacturing semiconductor device | Koichi Yatsuda | 2011-01-18 |
| 7736942 | Substrate processing apparatus, substrate processing method and storage medium | Takamichi Kikuchi | 2010-06-15 |
| 7700494 | Low-pressure removal of photoresist and etch residue | Vaidyanathan Balasubramaniam, Masaaki Hagihara, Koichiro Inazawa | 2010-04-20 |
| 7682517 | Method of processing substrate, and method of and program for manufacturing electronic device | Kenya Iwasaki | 2010-03-23 |
| 7622392 | Method of processing substrate, method of manufacturing solid-state imaging device, method of manufacturing thin film device, and programs for implementing the methods | Kenya Iwasaki | 2009-11-24 |
| 7532717 | Echo canceler with automatic gain control of echo cancellation signal | — | 2009-05-12 |
| 7510972 | Method of processing substrate, post-chemical mechanical polishing cleaning method, and method of and program for manufacturing electronic device | Kenya Iwasaki | 2009-03-31 |
| 7465673 | Method and apparatus for bilayer photoresist dry development | Yoshiki Igarashi, Kouichiro Inazawa, Kimihiro Higuchi, Vaidyanathan Balasubramaniam, Ralph Kim +2 more | 2008-12-16 |