| 8093070 |
Method for leakage reduction in fabrication of high-density FRAM arrays |
Kezhakkedath R. Udayakumar, Gregory B. Shinn, Theodore S. Moise, Scott R. Summerfelt |
2012-01-10 |
$9,197,000 |
| 8053252 |
Mitigation of edge degradation in ferroelectric memory devices through plasma etch clean |
Kezhakkedath R. Udayakumar, Lindsey Hall, Scott R. Summerfelt |
2011-11-08 |
$4,653,000 |
| 7985603 |
Ferroelectric capacitor manufacturing process |
Robert J. Kraft, Kezhakkedath R. Udayakumar, Scott R. Summerfelt, Theodore S. Moise |
2011-07-26 |
$16,775,000 |
| 7811882 |
Hardmask manufacture in ferroelectric capacitors |
— |
2010-10-12 |
$8,088,000 |
| 7799582 |
Mitigation of edge degradation in ferroelectric memory devices through plasma etch clean |
Kezhakkedath R. Udayakumar, Lindsey Hall, Scott R. Summerfelt |
2010-09-21 |
$9,968,000 |
| 7723199 |
Method for cleaning post-etch noble metal residues |
Yaw S. Obeng, Kezhakkedath R. Udayakumar, Scott R. Summerfelt, Sanjeev Aggarwal, Lindsey Hall +2 more |
2010-05-25 |
$6,939,000 |
| 7572698 |
Mitigation of edge degradation in ferroelectric memory devices through plasma etch clean |
Kezhakkedath R. Udayakumar, Lindsey Hall, Scott R. Summerfelt |
2009-08-11 |
$10,923,000 |
| 7572733 |
Gas switching during an etch process to modulate the characteristics of the etch |
Ping Jiang |
2009-08-11 |
$10,923,000 |
| 7560385 |
Etching systems and processing gas specie modulation |
Ping Jiang |
2009-07-14 |
$12,487,000 |
| 7425512 |
Method for etching a substrate and a device formed using the method |
Kezhakkedath R. Udayakumar, Ted S. Moise, Scott R. Summerfelt, Martin G. Albrecht, William W. Dostalik |
2008-09-16 |
$20,227,000 |
| 7361599 |
Integrated circuit and method |
Theodore S. Moise, Guoqiang Xing, Mark Visokay, Justin Gaynor, Stephen Roy Gilbert +2 more |
2008-04-22 |
$7,957,000 |
| 7300878 |
Gas switching during an etch process to modulate the characteristics of the etch |
Ping Jiang |
2007-11-27 |
$14,974,000 |
| 7300883 |
Method for patterning sub-lithographic features in semiconductor manufacturing |
Brian Smith, James Walter Blatchford, Robert J. Kraft |
2007-11-27 |
$14,974,000 |
| 7250349 |
Method for forming ferroelectric memory capacitor |
Mahesh Thakre, Scott R. Summerfelt |
2007-07-31 |
$39,976,000 |
| 7029925 |
FeRAM capacitor stack etch |
Scott R. Summerfelt, Mahesh Thakre |
2006-04-18 |
$17,140,000 |
| 6902939 |
Integrated circuit and method |
Theodore S. Moise, Guoqiang Xing, Mark Visokay, Justin Gaynor, Stephen Roy Gilbert +2 more |
2005-06-07 |
$25,702,000 |
| 6872665 |
Process flow for dual damescene interconnect structures |
Guoqiang Xing, Andrew John McKerrow, Andrew Ralston, Zhicheng Tang, Kenneth Newton +2 more |
2005-03-29 |
$17,205,000 |
| 6841396 |
VIA0 etch process for FRAM integration |
K. Udayakumar, Scott R. Summerfelt, Theodore S. Moise |
2005-01-11 |
$22,035,000 |
| 6713342 |
FeRAM sidewall diffusion barrier etch |
Scott R. Summerfelt, Tomoyuki Sakoda, Chiu Chi |
2004-03-30 |
|
| 6605482 |
Process for monitoring the thickness of layers in a microelectronic device |
Maureen A. Hanratty, Katherine E. Violette, Rick L. Wise |
2003-08-12 |
$40,591,000 |
| 6521042 |
Semiconductor growth method |
Alan Katz, Yung-Chung Kao, Theodore S. Moise |
2003-02-18 |
$18,407,000 |
| 6509574 |
Optocouplers having integrated organic light-emitting diodes |
Han-Tzong Yuan, Tae Seung Kim, Simon Joshua Jacobs |
2003-01-21 |
$31,201,000 |
| 6506616 |
Photolithographic method for fabricating organic light-emitting diodes |
Tae Seung Kim, Simon Joshua Jacobs |
2003-01-14 |
$52,344,000 |
| 6455411 |
Defect and etch rate control in trench etch for dual damascene patterning of low-k dielectrics |
Ping Jiang, Kenneth Newton, Hiromi Sakima |
2002-09-24 |
$17,599,000 |
| 6444542 |
Integrated circuit and method |
Theodore S. Moise, Guoqiang Xing, Mark Visokay, Justin Gaynor, Stephen Roy Gilbert +2 more |
2002-09-03 |
$29,422,000 |