| 9218981 |
Hydrogen passivation of integrated circuits |
Gul B. Basim, Scott R. Summerfelt |
2015-12-22 |
| 8778700 |
Hydrogen barrier for ferroelectric capacitors |
Kezhakkedath R. Udayakumar, Scott R. Summerfelt, Manoj Kumar Jain |
2014-07-15 |
| 8779485 |
Hydrogen barrier for ferroelectric capacitors |
Kezhakkedath R. Udayakumar, Scott R. Summerfelt, Manoj Kumar Jain |
2014-07-15 |
| 8669644 |
Hydrogen passivation of integrated circuits |
Gul B. Basim, Scott R. Summerfelt |
2014-03-11 |
| 8496842 |
MEMS device fabricated with integrated circuit |
Kezhakkedath R. Udayakumar, Marie Denison |
2013-07-30 |
| 8440508 |
Hydrogen barrier for ferroelectric capacitors |
Kezhakkedath R. Udayakumar, Scott R. Summerfelt, Manoj Kumar Jain |
2013-05-14 |
| 8384190 |
Passivation of integrated circuits containing ferroelectric capacitors and hydrogen barriers |
Scott R. Summerfelt, Gul B. Basim |
2013-02-26 |
| 8329588 |
Passivation of integrated circuits containing ferroelectric capacitors and hydrogen barriers |
Scott R. Summerfelt, Gul B. Basim |
2012-12-11 |
| 7772014 |
Semiconductor device having reduced single bit fails and a method of manufacture thereof |
Kezhakkedath R. Udayakumar, Qi Jiang |
2010-08-10 |
| 7425512 |
Method for etching a substrate and a device formed using the method |
Kezhakkedath R. Udayakumar, Scott R. Summerfelt, Martin G. Albrecht, William W. Dostalik, Francis G. Celii |
2008-09-16 |
| 6734477 |
Fabricating an embedded ferroelectric memory cell |
Scott R. Summerfelt, Eden Zielinski, Scott Johnson |
2004-05-11 |
| 6692976 |
Post-etch cleaning treatment |
Laura Wills Mirkarimi, Stephen Roy Gilbert, Guoqiang Xing, Scott R. Summerfelt, Tomoyuki Sakoda |
2004-02-17 |