Issued Patents All Time
Showing 76–100 of 130 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9280046 | Method of fabricating mask | Anthony Yen, Chih-Tsung Shih, Ming-Jiun Yao, Yen-Cheng Lu, Jeng-Horng Chen +1 more | 2016-03-08 |
| 9261774 | Extreme ultraviolet lithography process and mask with reduced shadow effect and enhanced intensity | Yen-Cheng Lu, Jeng-Horng Chen, Anthony Yen | 2016-02-16 |
| 9257282 | Method of semiconductor integrated circuit fabrication | Chih-Tsung Shih, Tsung-Min Huang, Chung-Ju Lee, Jeng-Horng Chen, Anthony Yen | 2016-02-09 |
| 9256123 | Method of making an extreme ultraviolet pellicle | Chih-Tsung Shih, Tien-Hsi Lee, Chia-Jen Chen, Shang-Chieh Chien, Jeng-Horng Chen +1 more | 2016-02-09 |
| 9252048 | Metal and via definition scheme | Yen-Cheng Lu, Chih-Tsung Shih, Jeng-Horng Chen, Anthony Yen | 2016-02-02 |
| 9244366 | Extreme ultraviolet lithography process and mask | Yen-Cheng Lu, Jeng-Horng Chen, Anthony Yen | 2016-01-26 |
| 9229326 | Method for integrated circuit patterning | Yen-Cheng Lu, Shu-Hao Chang, Jui-Ching Wu, Jeng-Horng Chen, Anthony Yen | 2016-01-05 |
| 9223197 | Lithography and mask for resolution enhancement | Yen-Cheng Lu, Anthony Yen | 2015-12-29 |
| 9213232 | Reflective mask and method of making same | Pei-Cheng Hsu, Chih-Tsung Shih, Chia-Jen Chen, Tsiao-Chen Wu, Hsin-Chang Lee +1 more | 2015-12-15 |
| 9195135 | Method for mask fabrication and repair | Yen-Cheng Lu, Jeng-Horng Chen, Anthony Yen | 2015-11-24 |
| 9182659 | Extreme ultraviolet lithography process and mask | Yen-Cheng Lu, Jeng-Horng Chen, Anthony Yen | 2015-11-10 |
| 9184054 | Method for integrated circuit patterning | Tsung-Min Huang, Chih-Tsung Shih, Chung-Ju Lee, Chieh-Han Wu, Jeng-Horng Chen | 2015-11-10 |
| 9146459 | Extreme ultraviolet lithography process and mask | Yen-Cheng Lu, Jeng-Horng Chen, Anthony Yen | 2015-09-29 |
| 9134604 | Extreme ultraviolet (EUV) mask and method of fabricating the EUV mask | Chih-Tsung Shih, Hsin-Chieh Yao, Jeng-Horng Chen, Chung-Ju Lee, Anthony Yen | 2015-09-15 |
| 9122166 | Extreme ultraviolet lithography process and mask | Yen-Cheng Lu, Jeng-Horng Chen, Anthony Yen | 2015-09-01 |
| 9116435 | Extreme ultraviolet lithography mask | Yen-Cheng Lu, Anthony Yen | 2015-08-25 |
| 9091947 | Extreme ultraviolet light (EUV) photomasks and fabrication methods thereof | Yen-Cheng Lu, Chih-Tsung Shih, Jeng-Horng Chen, Anthony Yen | 2015-07-28 |
| 9081312 | Method to define multiple layer patterns with a single exposure by E-beam lithography | Yen-Cheng Lu, Chih-Tsung Shih, Jeng-Horng Chen, Anthony Yen | 2015-07-14 |
| 9081288 | Extreme ultraviolet (EUV) mask, method of fabricating the EUV mask and method of inspecting the EUV mask | Chih-Tsung Shih, Yen-Cheng Lu, Jeng-Horng Chen, Anthony Yen | 2015-07-14 |
| 9075313 | Multiple exposures in extreme ultraviolet lithography | Anthony Yen, Yen-Cheng Lu | 2015-07-07 |
| 9052595 | Lithography process | Anthony Yen | 2015-06-09 |
| 9046781 | Structure and method for reflective-type mask | Chih-Tsung Shih, Jeng-Horng Chen, Wei Liu, Chia-Chen Chen, Chi-Lun Lu +1 more | 2015-06-02 |
| 9034569 | Extreme ultraviolet lithography process and mask | Yen-Cheng Lu, Jeng-Horng Chen, Anthony Yen | 2015-05-19 |
| 8877409 | Reflective mask and method of making same | Pei-Cheng Hsu, Chih-Tsung Shih, Chia-Jen Chen, Tsiao-Chen Wu, Hsin-Chang Lee +1 more | 2014-11-04 |
| 8841047 | Extreme ultraviolet lithography process and mask | Yen-Cheng Lu, Anthony Yen | 2014-09-23 |