Issued Patents All Time
Showing 126–130 of 130 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492073 | Removal of line end shortening in microlithography and mask set for removal | Burn Jeng Lin, Ru-Gun Liu, Shih-Ying Chen, Hua-Tai Lin, Anthony Yen +1 more | 2002-12-10 |
| 6348288 | Resolution enhancement method for deep quarter micron technology | Hong-Chang Hsieh | 2002-02-19 |
| 6316152 | OPC method to improve e-beam writing time | Hong-Chang Hsieh, Hung-Jui Kuo | 2001-11-13 |
| 6251745 | Two-dimensional scaling method for determining the overlay error and overlay process window for integrated circuits | — | 2001-06-26 |
| 5894350 | Method of in line intra-field correction of overlay alignment | Hung-Chang Hsieh | 1999-04-13 |