Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7906252 | Multiple resist layer phase shift mask (PSM) blank and PSM formation method | Hsin-Chang Lee, Chia-Jen Chen, Lee-Chih Yeh | 2011-03-15 |
| 7460251 | Dimension monitoring method and system | Shih-Ming Chang, Chen-Yuan Hsia, Wen-Chuan Wang, Chi-Lun Lu, Yen-Bin Huang +4 more | 2008-12-02 |
| 7314689 | System and method for processing masks with oblique features | Burn Jeng Lin, Ping-Che YANG, Yao-Ching Ku, Chin Hsian Lin, Chiu-Shan Yoo | 2008-01-01 |
| 6348288 | Resolution enhancement method for deep quarter micron technology | Shinn-Sheng Yu | 2002-02-19 |
| 6316152 | OPC method to improve e-beam writing time | Hung-Jui Kuo, Shinn-Sheng Yu | 2001-11-13 |