Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8046860 | System and method for removing particles in semiconductor manufacturing | Chang-Cheng Hung, Chi-Lun Lu, Shih-Ming Chang, Wen-Chuan Wang, Yen-Bin Huang +2 more | 2011-11-01 |
| 7819980 | System and method for removing particles in semiconductor manufacturing | Chang-Cheng Hung, Chi-Lun Lu, Shih-Ming Chang, Wen-Chuan Wang, Yen-Bin Huang +2 more | 2010-10-26 |
| 7460251 | Dimension monitoring method and system | Shih-Ming Chang, Wen-Chuan Wang, Chi-Lun Lu, Yen-Bin Huang, Chang-Cheng Hung +4 more | 2008-12-02 |